ERangeError on program start up using the Performance Profiler in Delphi 10.1 Berlin

To improve the performance of our program, we've recently started to use AQtime Pro 8, but we're facing the following issues:

After selecting all modules of our executable and running the program with profiling activated, we're getting a madExcept error message (see below)

The error also occurs when disabling madExcept and doesn't occur when starting the program directly or in debug mode in Delphi.

The instrumenting modules procedure doesn't return any errors.

We can avoid the error, when excluding some of the program's units. Unfortunately, the units we have to exclude, are exactly the units we want to analyze.

Following settings are active:

Thread model: Win32 threads

Active counter: Elapsed Time

Profile <Root> routine NOT selected

Disable inlining NOT selected
Profile .NET runtime NOT selected

Changing these settings never led to a working outcome, though.

Error message:

ERangeError

call stack:

main thread ($4064):
00416c5d +5d XXX.exe System 34247 +9 DynArraySetLength
0041705c +2c XXX.exe System 34384 +9 @DynArraySetLength

thread $3e5c:
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $6804:
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $79c:
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $2588:
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $497c:
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $5f10:
7fff93f4 +f7 KERNELBASE.dll WaitForMultipleObjectsEx

thread $3920:
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $5388:
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $5354:
7fff93f4 +f7 KERNELBASE.dll WaitForMultipleObjectsEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $5398:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $466c: <priority:2>
7fff93f4 +f7 KERNELBASE.dll WaitForMultipleObjectsEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $59d8:
7fff93f2 +9a KERNELBASE.dll SleepEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $56f4:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $457c:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $5954:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $5130:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $66e4:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $6920:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $686c:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $4818:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart

thread $2898:
7fff93f2 +8c KERNELBASE.dll WaitForSingleObjectEx
7fff9705 +0e KERNEL32.DLL BaseThreadInitThunk
7fff9719 +1b ntdll.dll RtlUserThreadStart